Combined Focused Electron Beam-Induced Deposition and Etching for the Patterning of Dense Lines without Interconnecting Material

Autor: Sangeetha Hari, P. H. F. Trompenaars, J. J. L. Mulders, Pieter Kruit, C. W. Hagen

Publikováno v: Micromachines, Vol 12, Iss 1, p 8 (2020)

High resolution dense lines patterned by focused electron beam-induced deposition (FEBID) have been demonstrated to be promising for lithography. One of the challenges is the presence of interconnecting material, which is often carbonaceous, between

Externí odkaz: https://doaj.org/article/3eb5876e3151482f8fad297a73284782

Functional nickel-based deposits synthesized by focused beam induced processing

Autor: B Bert Koopmans, E Roelfsema, P H F Trompenaars, J J L Mulders, B Barcones, Marcel A. Verheijen, Rosa Córdoba

Publikováno v: Nanotechnology, 27(6):065303, 1-11. Institute of Physics

Functional nanostructures fabricated by focused electron/ion beam induced processing (FEBIP/FIBIP) open a promising route for applications in nanoelectronics. Such developments rely on the exploration of new advanced materials. We report here the suc

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3df444f3ff457353f9b27f69937fe57d
https://doi.org/10.1088/0957-4484/27/6/065303

Purity and resistivity improvements for electron-beam-induced deposition of Pt

Autor: J. J. L. Mulders

Publikováno v: Applied Physics A. 117:1697-1704

Electron-beam-induced deposition (EBID) of platinum is used by many researchers. Its main application is the formation of a protective layer and the “welding material” for making a TEM lamella with a focused ion beam thinning process. For this ap

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::cdffbe146c8f5182fe4049a6999d4625
https://doi.org/10.1007/s00339-014-8662-2

Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide

Autor: Anastasiia V. Riazanova, Andrey Aristov, Liubov Belova, Andrei V. Kabashin, E. Dan Dahlberg, Y. G. M. Rikers, J. J. L. Mulders, Barry N. Costanzi

Publikováno v: Nanotechnology
Nanotechnology, Institute of Physics, 2016, 27 (11), ⟨10.1088/0957-4484/27/11/115304⟩
Nanotechnology, 2016, 27 (11), ⟨10.1088/0957-4484/27/11/115304⟩

International audience; Electron-beam-induced deposition of titanium oxide nanopatterns is described. The precursor is titanium tetra-isopropoxide, delivered to the deposition point through a needle and mixed with oxygen at the same point via a flow

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c2f2cd7f664e7dc3fb78f316533f29c3
https://hal.archives-ouvertes.fr/hal-01418481

Characterization of a new cobalt precursor for focused beam deposition of magnetic nanostructures

Autor: Alberto Ghirri, Marco Affronte, Gian Carlo Gazzadi, Piet Trompenaars, Stefano Frabboni, J. J. L. Mulders, Alberto Rota

Publikováno v: Microelectronic engineering 88 (2011): 1955–1958. doi:10.1016/j.mee.2010.12.031
info:cnr-pdr/source/autori:G.C. Gazzadi; J.J.L. Mulders; P. Trompenaars; A. Ghirri; A. Rota; M. Affronte; S. Frabboni/titolo:Characterization of a new cobalt precursor for focused beam deposition of magnetic nanostructures/doi:10.1016%2Fj.mee.2010.12.031/rivista:Microelectronic engineering/anno:2011/pagina_da:1955/pagina_a:1958/intervallo_pagine:1955–1958/volume:88

The electrical and magnetic properties of nanowires deposited from cobalt tricarbonyl nitrosyl (Co(CO)"3NO) precursor by focused electron beam- and focused ion beam-induced deposition (FEBID and FIBID) have been investigated. As-deposited nanowires h

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4535c01e600f20bae6ceb430e70dd62c
https://doi.org/10.1016/j.mee.2010.12.031