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pro vyhledávání: '"J. H. Dell"'
Autor:
Robert C. Woodward, Mariusz Martyniuk, Roger Jeffery, N. RadhaKrishnan, J. H. Dell, Lorenzo Faraone
Publikováno v:
2014 Conference on Optoelectronic and Microelectronic Materials & Devices.
We report issues associated with the calibration of a biased target ion beam deposition system. Variations in deposition rates and oxygen flow have been observed when depositing individual metal oxide films immediately after films deposited from diff
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::12b7443b11970cc3ddc2ef3b5f95baf0
https://doi.org/10.1109/commad.2014.7038674
https://doi.org/10.1109/commad.2014.7038674
