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pro vyhledávání: '"J. G. Borner"'
Autor:
K.M. van Delft, Wouter Olthuis, B.H. Timmer, R.P. Otjes, J. G. Borner, Piet Bergveld, A. van den Berg
Publikováno v:
Micro Total Analysis Systems 2001 ISBN: 9789401038935
A thin micromachined alternative for commercially available hydrophobic microporous membranes used in diffusion gas samplers has been realized. The thin membrane is made of Si3N4 and is etched porous. Underneath the membrane a channel is created. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5fb47be7d0263340ea7a42e8f32890f8
https://doi.org/10.1007/978-94-010-1015-3_166
https://doi.org/10.1007/978-94-010-1015-3_166
