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pro vyhledávání: '"J. F. Ple"'
Autor:
Marc Juhel, Névine Rochat, Agnes Roche, Michel Olivier, S. Marthon, F. Tardif, J. F. Ple, Adrien Danel
Publikováno v:
Solid State Phenomena. :111-114
Autor:
N. Rochat, F. Tardif, Agnes Roche, Adrien Danel, A. Chabli, J. F. Ple, M. Olivier, C. Wyon, S. Marthon, Marc Juhel
Publikováno v:
AIP Conference Proceedings.
Organic contamination adsorbed on 200 mm silicon wafers was characterized using various analytical techniques. Surface hydrophobicity, apparent optical thickness and electrical surface charge are used to characterize the silicon surface state. They o