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pro vyhledávání: '"J. F. Barbot"'
Publikováno v:
Journal of Nuclear Materials. 570:153941
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 374:71-75
Single crystals of SiC were implanted with heavy inert gases (Xe, Ar) at elevated temperatures (300–800 °C) and for a large range of fluence (1 × 10 12 –1 × 10 15 ions cm −2 ). Thermodesorption measurements suggest that gas is trapped by imp
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Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 327:59-62
Single crystals of 4H-SiC were implanted with helium ions at temperatures of 400 and 700 °C in a large range of fluences. The damage accumulation versus fluence was studied through the tensile elastic strain determined by using X-ray diffraction mea
Publikováno v:
Journal of Physics: Conference Series
Journal of Physics: Conference Series, IOP Publishing, 2019, 1190, pp.012015. ⟨10.1088/1742-6596/1190/1/012015⟩
Journal of Physics: Conference Series, IOP Publishing, 2019, 1190, pp.012015. ⟨10.1088/1742-6596/1190/1/012015⟩
Damage formation in implanted 4H-SiC was studied as a function of dose and temperature of implantation. At RT the maximal strain as well as the surface swelling linearly increases suggesting a point defects swelling. With increasing temperature the s
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 272:309-312
Extended defects generated by helium implantation in germanium at temperatures up to 500 °C have been studied using transmission electron microscopy and X-ray diffraction. Extrinsic defects as well as bubbles do readily form at room temperature. The
Autor:
Paulo Fernando Papaleo Fichtner, M. F. Beaufort, F. Schaurich, Shay Reboh, J. F. Barbot, A.A.D. de Mattos
Publikováno v:
Scripta Materialia. 65:1045-1048
We report on the exfoliation mechanisms in light gas implanted Si. Microstructure characterization, extensive statistical analysis and solid mechanics theory show that exfoliation is caused by microcracks growing close to equilibrium pressure for hig
Publikováno v:
Journal of Nuclear Materials. 413:162-165
Effects of annealing on surface swelling in helium implanted 4H–SiC were studied for different implant conditions. The significant increase of surface swelling observed upon high temperature annealing of samples implanted under severe implant condi
Autor:
J. F. Barbot, Corneel Claeys, Christophe Tromas, Frédéric Pailloux, Luc Lajaunie, Marie-Laure David, Eddy Simoen
Publikováno v:
Materials Science in Semiconductor Processing. 11:300-304
A thin cobalt layer is deposited by electron beam evaporation onto a germanium substrate after an in situ cleaning annealing at 400 or 700 °C. The effect of these pre-treatments on the Co/Ge Schottky barrier properties and on the germanide formation
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 266:2776-2779
The changes in microstructure and mechanical properties of 4H-SiC implanted at room temperature with 50 keV helium ions have been studied. Up to 1 × 1016 cm−2, no significant change in mechanical properties is observed. Nevertheless, the as-create