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Publikováno v:
The 1998 international conference on characterization and metrology for ULSI technology.
MOSFET threshold voltage (VT) is the most important parameter governing sub-0.25 μm MOS device operation. Critical device performance issues such as speed, off state current and active power depend on VT (1). The primary components that influence VT
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 16:411
The spreading resistance profiling (SRP) method has undergone significant improvements over the last five years, enhancing the techniques’ capability for profiling sub-100 nm junctions. Newly developed procedures for conditioning probes, preparing