Zobrazeno 1 - 10
of 132
pro vyhledávání: '"J. C. N. Rijpers"'
Publikováno v:
SPIE Proceedings.
A comparative study of the crystallization behavior of nucleation- and growth-determined materials is presented. The influence of phase change layer thickness, additions and amorphous mark size on the crystallization rate is addressed. The long nucle
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::80da2d1ec279be83592b689eacfc6059
https://doi.org/10.1117/12.399337
https://doi.org/10.1117/12.399337
Autor:
Zheng, Yonghui1 (AUTHOR), Song, Wenxiong2 (AUTHOR), Song, Zhitang2 (AUTHOR) ztsong@mail.sim.ac.cn, Zhang, Yuanyuan1 (AUTHOR), Xin, Tianjiao1,2 (AUTHOR), Liu, Cheng1 (AUTHOR), Xue, Yuan2 (AUTHOR), Song, Sannian2 (AUTHOR), Liu, Bo3 (AUTHOR), Lin, Xiaoling4 (AUTHOR), Kuznetsov, Vladimir G.5 (AUTHOR), Tupitsyn, Ilya I.6 (AUTHOR), Kolobov, Alexander V.7 (AUTHOR) akolobov@herzen.spb.ru, Cheng, Yan1,2 (AUTHOR) ycheng@ee.ecnu.edu.cn
Publikováno v:
Advanced Science. 3/6/2024, Vol. 11 Issue 9, p1-9. 9p.
Autor:
J. C. N. Rijpers, C. V. J. M. Chang
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 12:536
The reactive ion etching of AlInGaP and GaAs with a gas mixture of SiCl4, CH4, and Ar is examined. Process parameters such as gas flow composition and radio‐frequency power input are varied. The CH4 flow variation in particular has a substantial ef
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4556b84450465f0a2300386e6a01a4f7
https://doi.org/10.1116/1.587034
https://doi.org/10.1116/1.587034
Autor:
J. C. N. Rijpers, J. B. A. D. van Zon
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 7:144-150
Partial pressure gradients in reactive dc‐magnetron sputtering are investigated. The combination of diffusion of the reactive gas (e.g., O2) in a sputtering gas (e.g., Ar) which is in a dynamic equilibrium and the high pumping speed of the substrat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e7b5a2dd4839db6a3356f13af3653f09
https://doi.org/10.1116/1.575743
https://doi.org/10.1116/1.575743
Tuning Thermal Stability and Power Consumption of Sb2 Te3 Phase Change Memory with Metallic Elements.
Publikováno v:
Advanced Electronic Materials; Aug2024, Vol. 10 Issue 8, p1-8, 8p
Autor:
Ume, Rubab, Gong, Haibo, Tokranov, Vadim, Yakimov, Michael, Brew, Kevin, Cohen, Guy, Lavoie, Christian, Schujman, Sandra, Liu, Jing, Frenkel, Anatoly I., Beckmann, Karsten, Cady, Nathaniel, Oktyabrsky, Serge
Publikováno v:
Journal of Applied Physics; 7/21/2022, Vol. 132 Issue 3, p1-12, 12p
Publikováno v:
Advanced Materials; 3/16/2023, Vol. 35 Issue 11, p1-6, 6p
Publikováno v:
Journal of Applied Physics; 5/7/2016, Vol. 119 Issue 17, p1-8, 8p, 1 Black and White Photograph, 3 Diagrams, 13 Graphs
Autor:
Li, Le lile@mail.sim.ac.cn, Song, Sannian1 songsannian@mail.sim.ac.cn, Zhang, Zhonghua1, Song, Zhitang1, Cheng, Yan1, Lv, Shilong1, Wu, Liangcai1, Liu, Bo1, Feng, Songlin1
Publikováno v:
Applied Physics A: Materials Science & Processing. Aug2015, Vol. 120 Issue 2, p537-542. 6p. 1 Color Photograph, 4 Graphs.
Publikováno v:
Journal of Applied Physics; 2015, Vol. 117 Issue 4, p1-7, 7p, 1 Black and White Photograph, 2 Charts, 6 Graphs