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pro vyhledávání: '"J. C. Alonzo"'
Autor:
J. Markham, J. C. Alonzo, Howard E. Katz, J. E. Sohn, M. P. Bohrer, David A. Mixon, D. I. Cox
Publikováno v:
Journal of Applied Polymer Science. 40:1711-1715
The copolymerization of method methacrylate with methacrylates containing anilino side chains was investigated. Azobis (isobutyronitrile) was a better initiator than benzoyl peroxide. Continuous feed of initiator was advantageous compared to adding t
Publikováno v:
Advances in Resist Technology and Processing XI.
In chemically amplified resist polymers containing t-butoxycarbonyloxystyrene (TBS), a photogenerated acid catalytically removes the t-butoxycarbonyl (TBOC) protecting groups, yielding hydroxystyrene (HS) and thereby promoting aqueous base solubility