Zobrazeno 1 - 10
of 31
pro vyhledávání: '"J. B. Varesi"'
Autor:
L. A. Almeida, James D. Benson, J. K. Markunas, Marvin Jaime-Vasquez, J. B. Varesi, Andrew J. Stoltz, M. Martinka
Publikováno v:
Journal of Electronic Materials. 37:152-156
Brief low-energy helium plasma exposure of mercury cadmium telluride and indium antimonide results in oxide- and elemental-component-free, nearly stoichiometric surfaces. In these initial experiments, the only remaining residue is a topmost trace lay
Publikováno v:
Journal of Electronic Materials. 36:1007-1012
The surface roughness of inductively coupled plasma (ICP)-etched CdTe is greater than that of electron cyclotron resonance (ECR)-etched CdTe. This greater roughness is undesirable for further processing of the material. Lower-frequency plasma excitat
Publikováno v:
Journal of Electronic Materials. 35:1461-1464
High-density argon-hydrogen plasmas have been demonstrated to be very effective as etchants of CdTe, CdZnTe, and HgCdTe materials for focal plane array applications. Understanding the physical, chemical, and electrical characteristics of these surfac
Publikováno v:
Journal of Electronic Materials. 35:1443-1448
We have examined the formation and removal of native surface films on Hg1−xCdxTe (n-type, x=0.2). Samples were etched with a Br-based solution and then characterized by spectroscopic ellipsometry and X-ray photoelectron spectroscopy. A second set o
Autor:
J. K. Markunas, J.C. Molstad, J. B. Varesi, Scott M. Johnson, Andrew J. Stoltz, Edward P. Smith, L. A. Almeida, M. Jaime-Vasquez, J. D. Benson
Publikováno v:
Journal of Electronic Materials. 35:1434-1442
The surface of (111)A HgCdTe has been studied by reflection high-energy electron diffraction and atomic force microscopy (AFM). The as-grown liquid-phase epitaxy (LPE) surface has bilayer (3.7 ± 0.2 A) step/terrace structures, macro-steps, and cross
Autor:
J. B. Varesi, E. A. Patten, P. M. Goetz, Edward P. Smith, Scott M. Johnson, Brett Z. Nosho, J. D. Benson, G. M. Venzor, John A. Roth, W. A. Radford, Andrew J. Stoltz, J. E. Jensen
Publikováno v:
Journal of Electronic Materials. 35:1145-1152
High-performance 20-µm unit-cell two-color detectors using an n-p+-n HgCdTe triple-layer heterojunction (TLHJ) device architecture grown by molecular beam epitaxy (MBE) on (211)-oriented CdZnTe substrates with midwavelength (MW) infrared and long wa
Publikováno v:
Journal of Electronic Materials. 34:1242-1248
(211) oriented silicon substrates were patterned and etched to give mesas of various sizes and shapes. Cadmium telluride epitaxial layers were deposited on the patterned substrates by molecular beam epitaxy (MBE). Dislocation termini in the epilayer
Autor:
Scott M. Johnson, J. B. Varesi, M. Martinka, Andrew J. Stoltz, P. R. Boyd, Edward P. Smith, John H. Dinan, J. D. Benson, L. A. Almeida, J. K. Markunas, A. W. Kaleczyc
Publikováno v:
Journal of Electronic Materials. 34:726-732
The surface of (211)B HgCdTe has been studied by reflection high-energy electron diffraction (RHEED) and atomic force microscopy (AFM). RHEED analysis of the as-grown Hg-rich molecular beam epitaxy (MBE) (211)B HgCdTe suggests the surface reconstruct
Autor:
M. D. Newton, M. V. Liguori, Andrew J. Stoltz, W. A. Radford, John H. Dinan, R. E. Bornfreund, J. D. Benson, J. K. Gleason, J. B. Varesi, Scott M. Johnson, G. M. Venzor, Edward P. Smith
Publikováno v:
Journal of Electronic Materials. 34:746-753
Inductively coupled plasma (ICP) using hydrogen-based gas chemistry has been developed to meet requirements for deep HgCdTe mesa etching and shallow CdTe passivation etching in large format HgCdTe infrared focal plane array (FPA) fabrication. Large f
Autor:
L. A. Almeida, J. B. Varesi, P. R. Boyd, A. W. Kaleczyc, Whitney Mason, Andrew J. Stoltz, J. D. Benson, John H. Dinan, M. Martinka
Publikováno v:
Journal of Electronic Materials. 34:758-761
We have examined the etching of HgCdTe (x=0.2) with bromine/ethylene glycol (Br/EG) solutions. Using a spectroscopic ellipsometer, we tracked the ellipsometric parameters (ψ and Δ) of the freshly etched HgCdTe surfaces. Parameters ψ and Δ were me