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pro vyhledávání: '"J. B. Riendeau"'
Autor:
J. G. Ryan, D. P. Bouldin, Timothy D. Sullivan, D. C. Beyar, George J. Slusser, J. B. Riendeau, S. E. Shore
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 8:1474-1479
Evaporated metallizations composed of aluminum alloys and titanium underlayers were patterned, passivated with plasma enhanced chemical vapor deposited SiNx and aged for 1000 h at 150 °C in order to observe stress‐induced void formation. Metal fil
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a595e531e9f10d4ac6e0287264cba555
https://doi.org/10.1116/1.576860
https://doi.org/10.1116/1.576860
