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pro vyhledávání: '"J. Alfredo Rodriguez Ramirez"'
Autor:
J. Alfredo Rodriguez Ramirez, J. G. Vera Dimas, Ramón Cabello Ruiz, Margarita Tecpoyotl Torres, Alejandra Ocampo Diaz, J. Jesús Escobedo Alatorre
Publikováno v:
SPIE Proceedings.
Due to the diversity and multiple energy domains involved, Micro-Electromechanical Systems MEMS devices are vulnerable to several mechanical failures such as fatigue. They been widely used in military applications, radio frequency systems, pressure s