Zobrazeno 1 - 5
of 5
pro vyhledávání: '"J. A. Vallés-Abarca"'
Publikováno v:
Nonequilibrium Processes in Partially Ionized Gases ISBN: 9781461366850
A typical and important problem of nonequilibrium gas dynamics is the fate of the high energy particles sputtered from the cathode in a gas discharge. Sputtered particles leave the cathode with energies of the order of 10 eV which is 2 orders of magn
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6ed131c229a3c87a34ec58a46e6000e2
https://doi.org/10.1007/978-1-4615-3780-9_50
https://doi.org/10.1007/978-1-4615-3780-9_50
Publikováno v:
Thin Solid Films. 58:67-71
The influence of the base electrode material and of the plasma sputtering method of deposition was investigated by measuring the equivalent impedance of metal-CdTeAl thin film sandwich structures over the frequency range 20 Hz–2 MHz at temperatu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::def3db5a063e6784d13d6b7067a08ad1
https://doi.org/10.1016/0040-6090(79)90210-4
https://doi.org/10.1016/0040-6090(79)90210-4
Publikováno v:
Radiation Effects. 41:165-173
The generalization for binary targets, of the ideas proposed by Sigmund for monoatomic targets, leads to a set of coupled integrodifferential equations for the sputtering functions. After moment decomposition, we obtain the final formulae by the stan
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f2e17571896b1a4987ea0973811d40f6
https://doi.org/10.1080/00337577908236961
https://doi.org/10.1080/00337577908236961
Autor:
Germán González-Díaz, J. A. Vallés‐Abarca, F. Sánchez‐Quesada, M. Rodriguez-Vidal, A. Gras-Marti, Ignacio Mártil
Publikováno v:
ResearcherID
Experimental thickness profiles of thin films deposited on substrates perpendicular to the target being sputtered show maxima whose position depends on the sputtering gas pressure. A simple model of particle slowing down in the transport stage accoun
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4d22b9870f7badea6048a76404ac1832
https://doi.org/10.1116/1.572028
https://doi.org/10.1116/1.572028
Autor:
A. Gras‐Marti, J. A. Vallés‐Abarca
Publikováno v:
Journal of Vacuum Science and Technology. 21:891-892
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9af88f9826f011d51e81fc8f858ade62
https://doi.org/10.1116/1.571842
https://doi.org/10.1116/1.571842