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pro vyhledávání: '"J-C Saubat"'
Autor:
Serge Toutain, Ahmed Rhallabi, F. Challali, Antoine Goullet, J-C Saubat, A. Charpentier, M-P Besland, Dominique Averty, J-P. Landesman, S. Salimy
Publikováno v:
2010 Proceedings of the European Solid State Device Research Conference.
The present paper aims at integrating thin films as passive components in the Back End of Line of an industrial Si-based CMOS technology while keeping limited additional technological steps. TiN x O y and Ti x Ta y O thin films deposited by magnetron
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6cd954de9d2dff7b93b640d3691fb3f3
https://doi.org/10.1109/essderc.2010.5618467
https://doi.org/10.1109/essderc.2010.5618467
Publikováno v:
2009 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM
IEEE/MTT-S International Microwave Symposium
IEEE/MTT-S International Microwave Symposium, Jun 2009, Boston, MA, United States. pp.1017
IEEE/MTT-S International Microwave Symposium
IEEE/MTT-S International Microwave Symposium, Jun 2009, Boston, MA, United States. pp.1017
International audience; An enhanced scalable compact model for on-chip RF spiral inductors is presented in this paper. By considering the layout and technology parameters under quasi-static approximation, the model elements are all expressed analytic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e09082a4824928cf1e130a1da31d8d32
https://hal.archives-ouvertes.fr/hal-00475904
https://hal.archives-ouvertes.fr/hal-00475904
Conference
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