Zobrazeno 1 - 10
of 232
pro vyhledávání: '"J Provine"'
Autor:
S. Burgmann, M.J. Lid, H.J.D. Johnsen, N.P. Vedvik, B. Haugen, J. Provine, A.T.J. van Helvoort, J. Torgersen
Publikováno v:
Heliyon, Vol 10, Iss 4, Pp e26420- (2024)
The fabrication of thinnest, yet undeformed membrane structures with nanometer resolution is a prerequisite for a variety of Microelectromechanical systems (MEMS). However, functionally relevant thin films are susceptible to growth-generated stress.
Externí odkaz:
https://doaj.org/article/79a660c3c72f40fba12c03bc5889be89
Autor:
Stephanie Birgit Burgmann, Markus Joakim Lid, Håkon J. D. Johnsen, Nils Petter Vedvik, Bjørn Haugen, J Provine, Antonius T. J. van Helvoort, Jan Torgensen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d4600a9a012c4f3a9206d8dfe4b00670
https://doi.org/10.2139/ssrn.4365894
https://doi.org/10.2139/ssrn.4365894
Autor:
J. Provine, Peter Schindler, Yongmin Kim, Steve P. Walch, Hyo Jin Kim, Ki-Hyun Kim, Fritz B. Prinz
Publikováno v:
AIP Advances, Vol 6, Iss 6, Pp 065012-065012-8 (2016)
The continued scaling in transistors and memory elements has necessitated the development of atomic layer deposition (ALD) of silicon nitride (SiNx), particularly for use a low k dielectric spacer. One of the key material properties needed for SiNx f
Externí odkaz:
https://doaj.org/article/c0029aa10b8346f2a2a3bdba28302023
Publikováno v:
ACS Applied Materials & Interfaces. 11:26082-26092
Microelectrodes are used in a wide range of applications from analytical electrochemistry and biomolecular sensing to in vivo implants. While a variety of insulating materials have been used to define the microelectrode active area, most are not suit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::016aac49af2e7cb7a39f0a3072d33352
https://doi.org/10.1021/acsami.9b06891
https://doi.org/10.1021/acsami.9b06891
Akademický článek
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Autor:
Adam Bertuch, J. Provine, Ganesh Sundaram, Nicola Ferralis, Jeffrey C. Grossman, Brent D. Keller
Publikováno v:
Chemistry of Materials. 29:2024-2032
Recent advances in the field of two-dimensional (2D) transition metal dichalcogenide (TMD) materials have indicated that atomic layer deposition (ALD) of the metal oxide and subsequent sulfidation could offer a method for the synthesis of large area
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::38a4836e72671d3f384f2471638c4fa8
https://doi.org/10.1021/acs.chemmater.6b03951
https://doi.org/10.1021/acs.chemmater.6b03951
Publikováno v:
ACS applied materialsinterfaces. 11(29)
Microelectrodes are used in a wide range of applications from analytical electrochemistry and biomolecular sensing to in vivo implants. While a variety of insulating materials have been used to define the microelectrode active area, most are not suit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::da5b2f6de4f4c462b4892b80f3b8f93b
https://pubmed.ncbi.nlm.nih.gov/31305057
https://pubmed.ncbi.nlm.nih.gov/31305057
Publikováno v:
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS).
This paper reports on a quality factor ( $Q$ )-boosting technique for aluminum nitride (AlN) Lamb wave resonators by lithographically defining their acoustic boundaries. The technique has been demonstrated to enhance resonator $Q$ from 980 to 3000 wi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c1208f6704048c0ae3a318df159eb5bc
https://doi.org/10.1109/memsys.2019.8870846
https://doi.org/10.1109/memsys.2019.8870846
Autor:
J. Provine, Peter Schindler, Anup L. Dadlani, Yongmin Kim, Jihwan An, Shinjita Acharya, Fritz B. Prinz
Publikováno v:
Acta Materialia. 117:153-159
Plasma-enhanced atomic layer deposition (PEALD) of ultrathin (∼7 nm) slightly Ti-rich Ba x Ti y O z (BTO) films with different Al-doping concentration ([Al]/([Al] + [Ba] + [Ti]) = 0 to 22 at%) was studied. In particular, the effects of Al-doping in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::73d8ccd78fb68752012b8a829fdabbf8
https://doi.org/10.1016/j.actamat.2016.07.018
https://doi.org/10.1016/j.actamat.2016.07.018
Publikováno v:
Ultramicroscopy. 166:39-47
Specimen preparation remains a practical challenge in transmission electron microscopy and frequently limits the quality of structural and chemical characterization data obtained. Prevailing methods for thinning of specimens to electron transparency
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7a9e6d19d9b159d1978a4031fa4ef8f4