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pro vyhledávání: '"J Jeroen Jonkers"'
Autor:
J Jeroen Jonkers
Publikováno v:
Plasma Sources Science and Technology. 15:S8-S16
Extreme ultra-violet (EUV) lithography is most likely to be used for the production of semiconductors from 2009. One of the potential showstoppers in the commercialization is the availability of a compact high power source. This paper discusses the l
Autor:
Antonio Gamero, Eah Eric Timmermans, van der Jjam Joost Mullen, Antonio Sola, de Fpj Frank Groote, J Jeroen Jonkers
Publikováno v:
Spectrochimica Acta. Part B : Atomic Spectroscopy, 58(5), 823-836. Elsevier
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A diagnostic measurement system based on atomic emission spectroscopy has been developed for the purpose of on-line monitoring of hazardous elements in industrial combustion gases. The aim was to construct a setup with a high durability for rough and
Publikováno v:
Plasma Sources Science and Technology, 12(1), 30-38. Institute of Physics
In this paper the electron density and temperature of atmospheric helium and argon plasmas operated under similar experimental conditions are compared. The conditions are chosen such that both plasmas are ionizing. It is found that a helium plasma ha
Publikováno v:
Journal of Physics D: Applied Physics, 35(20), 2578-2585. Institute of Physics
Temperatures have been measured in a high-pressure microwave sulfur lamp using sulfur atomic lines found in the spectrum at 867, 921 and 1045 nm. The absolute intensities were determined for 3, 5 and 7 bar lamps at several input powers, ranging from
Publikováno v:
Computer Physics Communications, 135(2), 199-218. Elsevier
This paper describes CRModel, a general collisional radiative modeling code written in C++. It uses a flexible plain text input file to describe all relevant aspects of the considered plasma region, including collisional cross sections and radiative
Publikováno v:
Journal of Physics D: Applied Physics, 33(21), 2798-2806. Institute of Physics
A collisional radiative model is presented for mercury discharges with electron temperatures between 0.75-2 eV and electron densities between 1018-1020 m-3. Such plasma parameters are encountered in a number of modern light sources, such as mercury-o
Autor:
J Jeroen Jonkers, Joost van der Mullen
Publikováno v:
Annals of the New York Academy of Sciences. 891:273-284
A general treatment or non-equilibrium aspects of plasmas is presented. This is done by relating transport fluxes to equilibrium restoring processes in so-called disturbed bilateral relations. Especially for small plasmas with consequently steep grad
Publikováno v:
Spectrochimica Acta Part B: Atomic Spectroscopy. 54:1017-1044
A characterization theory is constructed to relate external control parameters to averaged values of internal plasma properties. It is based on a study on the effect of transport fluxes on elementary balances. This theory is used to compare the induc
Publikováno v:
Journal of Physics D: Applied Physics, 32(8), 898-905. Institute of Physics
Typical values for the electron density and temperature in the Philips QL lamp are obtained from the radially resolved measurements of the gas temperature profile and the density of the lowest argon metastable state, as presented in a previous paper
Publikováno v:
Journal of Quantitative Spectroscopy and Radiative Transfer, 61(5), 703-709. Elsevier
Measuring excitation temperatures is a widely used way to characterise plasmas. In this paper we show that in most (atmospheric) helium plasmas this temperature is hardly related to any plasma quantity. It will appear that due to the strong non-equil