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pro vyhledávání: '"J E Greenspan"'
Publikováno v:
Semiconductor Science and Technology. 21:866-869
The multiple quantum well is an important backbone to a number of advanced III–V optoelectronic devices. These include semiconductor lasers, detectors and modulators. Increased device functionality can be achieved by monolithically integrating a mu
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 18:648-651
Selective area epitaxy of InP on masked (100) InP substrates is studied. InP layers are deposited between pairs of SiO2 stripes using low-pressure metalorganic chemical vapor deposition. Layer thickness is investigated by surface profiling and scanni