Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Jürgen Salfeld"'
Autor:
Alexander Koch, Hongyan Mei, Jura Rensberg, Martin Hafermann, Jad Salman, Chenghao Wan, Raymond Wambold, Daniel Blaschke, Heidemarie Schmidt, Jürgen Salfeld, Sebastian Geburt, Mikhail A. Kats, Carsten Ronning
Publikováno v:
Advanced Photonics Research, Vol 4, Iss 2, Pp n/a-n/a (2023)
Heavy and hyper doping of ZnO by a combination of gallium (Ga) ion implantation using a focused ion beam (FIB) system and post‐implantation laser annealing is demonstrated. Ion implantation allows for the incorporation of impurities with nearly arb
Externí odkaz:
https://doaj.org/article/e46dab54b73f4096a459f0aa4d857fa2
Autor:
Jürgen Salfeld, Andreas Undisz, Kevin Wolf, Martin Hafermann, Jura Rensberg, Sebastian Geburt, Carsten Ronning
Publikováno v:
Silicon Photonics XV.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a7e5eee303186639152eab6e3608e233
https://doi.org/10.1117/12.2545931
https://doi.org/10.1117/12.2545931