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pro vyhledávání: '"Jürgen Finster"'
Autor:
Uwe Schuhmann, Jörg Wunderlich, Hans-Jürgen Feige, Lutz Reichmann, Matthias Bening, Helmut Bernitzki, Jürgen Finster, Peter Triebel
Publikováno v:
SPIE Proceedings.
Today’s high brilliance Laser sources cause huge thermal effects on optical components, affecting process stability. This paper shows the holistic approach to the improvement of objective lenses to minimum thermal effects as focus shift. A new appr