Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Izumo, Yoji"'
Autor:
Hiroshi Hibino, Ichiro Nagashima, Yoshio Yamazaki, Kaori Komoda, Izumo Yoji, Aono Sho, Toshihiko Ueda, Masakazu Yata, Kikuchi Takumi
Publikováno v:
2013 e-Manufacturing & Design Collaboration Symposium (eMDC).
As an efficient measure against the risk of the damage of breakdown of semiconductor manufacturing equipment in particular vertical furnace, seismic isolation system for vertical furnaces was developed. By shaking table tests, it was experimentally c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::203c020d278fcb43398f5d4a5e01aac6
https://doi.org/10.1109/emdc.2013.6756062
https://doi.org/10.1109/emdc.2013.6756062
Autor:
Komoda, Kaori, Yata, Masakazu, Yamazaki, Yoshio, Ueda, Toshihiko, Aono, Sho, Hibino, Hiroshi, Nagashima, Ichiro, Izumo, Yoji, Kikuchi, Takumi
Publikováno v:
2013 e-Manufacturing & Design Collaboration Symposium (eMDC); 2013, p1-4, 4p