Zobrazeno 1 - 10
of 65
pro vyhledávání: '"Itoh, Masamitsu"'
Autor:
Buck, Peter D., Gallagher, Emily E., Naka, Masato, Ando, Akihiko, Morishita, Keiko, Yoshikawa, Ryoji, Kamo, Takashi, Hirano, Takashi, Itoh, Masamitsu
Publikováno v:
Proceedings of SPIE; October 2017, Vol. 10451 Issue: 1 p104510K-104510K-16, 10346507p
Autor:
Takehisa, Kiwamu, Kumada, Ai, Morishita, Keiko, Yagawa, Keisuke, Yoshikawa, Ryoji, Hirano, Takashi, Itoh, Masamitsu
Publikováno v:
Proceedings of SPIE; July 2017, Vol. 10454 Issue: 1 p104540Q-104540Q-6, 940867p
Study of CD variation at EUV mask fabrication occurred by electric conduction from top to back side.
Autor:
Takai, Kosuke, Murano, Koji, Hagihara, Kazuki, Itoh, Masamitsu, Abe, Tsukasa, Adachi, Takashi, Akizuki, Hideo, Takikawa, Tadahiko, Mohri, Hiroshi, Hayashi, Naoya
Publikováno v:
Proceedings of SPIE; Nov2009 Part 3, Issue 1, p73792I-73792I-8, 8p
Autor:
Sato, Takashi, Itoh, Masamitsu, Mimotogi, Akiko, Mimotogi, Shoji, Sato, Kazuya, Tanaka, Satoshi
Publikováno v:
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69242F-69242F-8, 8p
Publikováno v:
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p70280D-70280D-9, 9p
Autor:
Mimotogi, Akiko, Itoh, Masamitsu, Mimotogi, Shoji, Sato, Kazuya, Sato, Takashi, Tanaka, Satoshi, Inoue, Soichi
Publikováno v:
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p70283K-70283K-11, 11p
Autor:
Sakurai, Hideaki, Terayama, Masatoshi, Sakai, Mari, Itoh, Masamitsu, Ikenaga, Osamu, Funakoshi, Hideo, Sato, Norifumi, Nakamizo, Kenji, Nomura, Masato, Saito, Yoshihiko, Nakao, Junji, Hayashi, Naoya
Publikováno v:
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p71220D-71220D-12, 12p
Publikováno v:
Proceedings of SPIE; Nov2008, Issue 1, p692451-692451-10, 10p
Publikováno v:
Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65201J-65201J-12, 12p
Autor:
Mimotogi, Akiko, Itoh, Masamitsu, Mimotogi, Shoji, Sato, Kazuya, Sato, Takashi, Tanaka, Satoshi
Publikováno v:
Proceedings of SPIE; Nov2007 Part 2, Issue 1, p66071F-66071F-10, 10p