New method of fabrication of suspended metallic single electron transistor (SET).

Autor: Istiaque Rahaman, Mohammad, Szakmany, G. P., Orlov, A. O., Snider, G. L.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Jan2024, Vol. 42 Issue 1, p1-5, 5p