Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Ishimura, Takiji"'
Autor:
Noriaki Nakayamada, Takashi Kamikubo, Ishimura Takiji, Rieko Nishimura, Soichiro Mitsui, Yoshitada Gomi, Seiichi Tsuchiya, Hitoshi Higurashi, Hitoshi Sunaoshi, Hideo Inoue, Hideki Matsui, Kenji Ohtoshi, Shuichi Tamamushi, Kiminobu Akeno, Susumu Oogi, Akinori Mine, Yuichi Tachikawa
Publikováno v:
SPIE Proceedings.
Optical lithography is facing resolution limit. To overcome this issue, highly complicated patterns with high data volume are being adopted for optical mask fabrications. With this background, new electron beam mask writing system, EBM- 7000 is devel
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ef6fd0a63c8cfc505bc1f2ad76468605
https://doi.org/10.1117/12.833462
https://doi.org/10.1117/12.833462
Autor:
Kamikubo, Takashi, Ohtoshi, Kenji, Nakayamada, Noriaki, Nishimura, Rieko, Sunaoshi, Hitoshi, Akeno, Kiminobu, Mitsui, Soichiro, Tachikawa, Yuichi, Inoue, Hideo, Oogi, Susumu, Higurashi, Hitoshi, Mine, Akinori, Ishimura, Takiji, Tsuchiya, Seiichi, Gomi, Yoshitada, Matsui, Hideki, Tamamushi, Shuichi
Publikováno v:
Proceedings of SPIE; Nov2009 Part 3, Issue 1, p74881E-74881E-10, 10p
Autor:
Susumu Oogi, Susumu Oogi, Takiji Ishimura, Takiji Ishimura, Takashi Kamikubo, Takashi Kamikubo, Mitsuko Shimizu, Mitsuko Shimizu, Yoshiaki Hattori, Yoshiaki Hattori, Tomohiro Iijima, Tomohiro Iijima, Hirohito Anze, Hirohito Anze, Takayuki Abe, Takayuki Abe, Toru Tojo, Toru Tojo, Tadahiro Takigawa, Tadahiro Takigawa
Publikováno v:
Japanese Journal of Applied Physics; December 1998, Vol. 37 Issue: 12 p6779-6779, 1p