Electrical properties of 30 nm width bi-layer interconnects of multi layer graphene and Ni.

Autor: Ishikura, Taishi, Isobayashi, Atsunobu, Nishide, Daisuke, Ito, Ban, Saito, Tatsuro, Matsumoto, Takashi, Yamazaki, Yuichi, Miyazaki, Hisao, Watanabe, Masahito, Sakuma, Naoshi, Kajita, Akihiro, Sakai, Tadashi

Publikováno v: 2015 IEEE International Interconnect Technology Conference & 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM); 2015, p321-324, 4p

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Graphene interconenets selectively grown on catalytic metal damascene structure and its growth mechanism on Ni catalyst.

Autor: Wada, Makoto, Ishikura, Taishi, Nishide, Daisuke, Ito, Ban, Yamazaki, Yuichi, Saito, Tatsuro, Isobayashi, Atsunobu, Kagaya, Munehito, Matsumoto, Takashi, Kitamura, Masayuki, Sakata, Atsuko, Watanabe, Masahito, Sakuma, Naoshi, Kajita, Akihiro, Sakai, Tadashi

Publikováno v: 2013 IEEE International Interconnect Technology Conference - IITC; 2013, p1-3, 3p