Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Isaac Zomora"'
Autor:
Yuchun Wang, Joe Hawkins, Fred Sun, Roy Martinez, Isaac Zomora, Jian Zhang, Shumin Wang, Renjie Zhou, Bin Lu
Publikováno v:
MRS Proceedings. 816
A robust copper slurry should have high removal rate, efficient planarization, optimal over polishing window and fast clearing without corrosion. These requirements were addressed in the choice of abrasive particles, film formation for copper passiva
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1de148fe93a9dd712eb7658795c855a3
https://doi.org/10.1557/proc-816-k4.8
https://doi.org/10.1557/proc-816-k4.8
