Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Irène Poulet"'
Autor:
Aurélie Mizzi, Sasho Gligorovski, Irène Poulet, Nathalie Hayeck, Rachel Gemayel, Sabrine Tlili, Thomas Vitrani, Henri Wortham, Nicolas Pic, Brice Temime-Roussel, Philippe Maillot
Publikováno v:
International Journal of Mass Spectrometry
International Journal of Mass Spectrometry, Elsevier, 2015, 392, pp.102-110. ⟨10.1016/j.ijms.2015.09.017⟩
International Journal of Mass Spectrometry, 2015, 392, pp.102-110. ⟨10.1016/j.ijms.2015.09.017⟩
International Journal of Mass Spectrometry, Elsevier, 2015, 392, pp.102-110. ⟨10.1016/j.ijms.2015.09.017⟩
International Journal of Mass Spectrometry, 2015, 392, pp.102-110. ⟨10.1016/j.ijms.2015.09.017⟩
International audience; The organic contamination has been recently considered as the most important problem for the photolithography world in the semiconductor industry, especially when the photolithographic methods moved from 130 nm node to 32 nm n
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4a4b14e97243074831b3ac60d93dc755
https://hal.archives-ouvertes.fr/hal-01436875
https://hal.archives-ouvertes.fr/hal-01436875
Autor:
Sasho Gligorovski, Irène Poulet, Jacqueline Maalouly, Rachel Gemayel, Sylvain Ravier, Henri Wortham, Nathalie Hayeck
Publikováno v:
Talanta
Talanta, 2015, 144, pp.1163-1170. ⟨10.1016/j.talanta.2015.07.080⟩
Talanta, Elsevier, 2015, 144, pp.1163-1170. ⟨10.1016/j.talanta.2015.07.080⟩
Talanta, 2015, 144, pp.1163-1170. ⟨10.1016/j.talanta.2015.07.080⟩
Talanta, Elsevier, 2015, 144, pp.1163-1170. ⟨10.1016/j.talanta.2015.07.080⟩
International audience; Microelectronic wafers are exposed to airborne molecular contamination (AMC) during the fabrication process of microelectronic components. The organophosphate compounds belonging to the dopant group are one of the most harmful
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::aae248b12e1ac7ff3f36b17fb90be74b
https://hal.science/hal-01436873
https://hal.science/hal-01436873
Autor:
Aurélie Mizzi, Irène Poulet, Thomas Vitrani, Henri Wortham, Sasho Gligorovski, Philippe Maillot, Nicolas Pic, Brice Temime-Roussel, Nathalie Hayeck
Publikováno v:
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVIII
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVIII, 2014, Unknown, Unknown Region. ⟨10.1117/12.2045579⟩
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVIII, 2014, Unknown, Unknown Region. ⟨10.1117/12.2045579⟩
Conference on Metrology, Inspection, and Process Control for Microlithography XXVIII, San Jose, CA, FEB 24-27, 2014; International audience; Refractory compounds such as Trimethylsilanol (TMS) and other organic compounds such as propylene glycol meth
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cd2b61e73ac1ba469aea0c167a7b9289
https://hal.archives-ouvertes.fr/hal-01456411
https://hal.archives-ouvertes.fr/hal-01456411
Publikováno v:
Talanta
Talanta, Elsevier, 2014, 122, pp.63-69. ⟨10.1016/j.talanta.2014.01.029⟩
Talanta, 2014, 122, pp.63-69. ⟨10.1016/j.talanta.2014.01.029⟩
Talanta, Elsevier, 2014, 122, pp.63-69. ⟨10.1016/j.talanta.2014.01.029⟩
Talanta, 2014, 122, pp.63-69. ⟨10.1016/j.talanta.2014.01.029⟩
International audience; To prevent the degradation of the device characteristics it is important to detect the organic contaminants adsorbed on the wafers. In this respect, a reliable qualitative and quantitative analytical method for analysis of sem
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d40c178703e51280092ac497d7400ca4
https://pubmed.ncbi.nlm.nih.gov/24720963
https://pubmed.ncbi.nlm.nih.gov/24720963
