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pro vyhledávání: '"Inez Sochal"'
Autor:
Kyu-Tae Sun, Jong-Mun Jeong, Kevin Ryan, Min-Suk Kim, Michiel Kupers, Paul Böcker, Jin-Moo Byun, Inez Sochal, Gwang-Gon Kim, Jung-Joon Suh, Milenko Jovanović, Hwa-Yeon Won, Lydia Vergaij-Huizer, Young-Wan Lim
Publikováno v:
SPIE Proceedings.
In order to optimize yield in DRAM semiconductor manufacturing for 2x nodes and beyond, the (processing induced) overlay fingerprint towards the edge of the wafer needs to be reduced. Traditionally, this is achieved by acquiring denser overlay metrol
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b1d04c1ec94e95a2b61c7ef6b42f7d67
https://doi.org/10.1117/12.2220459
https://doi.org/10.1117/12.2220459
