Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ines Altendorf"'
Autor:
Johannes Muller, Aleksandra Titova, Hongsik Yoon, Thomas Merbeth, Martin Weisheit, Georg Wolf, Sanjeeb Bharali, Bert Pfefferling, Yuichi Otani, Tetyana Shapoval, Alberto Cagliani, Ferenc Vajda, Pedram Sadeghi, Christiana Villas-Boas Grimm, Frank Krause, Ines Altendorf, Gabriele Congedo, Robert Binder, Joachim Metzger, Alexander Lajn, Markus Langner, Young Seon You, Oliver Kallensee, Vinayak B. Naik, Kazutaka Yamane, Steven Soss
Publikováno v:
2022 IEEE International Memory Workshop (IMW).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::daba0180e474afe3cc2ab95b03eb8aa3
https://doi.org/10.1109/imw52921.2022.9779310
https://doi.org/10.1109/imw52921.2022.9779310
Autor:
Andreas Reichel, Adam Urbanowicz, Martin Weisheit, D.V. Likhachev, Ines Altendorf, Carsten Hartig
Publikováno v:
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
The majority of scatterometric models used in production control assume constant optical properties of the materials included into the film stack. Only dimensional parameters are assumed as the degrees of freedom. This assumption negatively impacts m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9e47db710cb7f2cad1efc0b7645c903a
https://doi.org/10.1109/asmc.2019.8791834
https://doi.org/10.1109/asmc.2019.8791834