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pro vyhledávání: '"Inchworm motor"'
Akademický článek
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Autor:
Almothana Albukhari, Ulrich Mescheder
Publikováno v:
Actuators, Vol 12, Iss 4, p 163 (2023)
Having benefited from technological developments, such as surface micromachining, high-aspect-ratio silicon micromachining and ongoing miniaturization in complementary metal–oxide–semiconductor (CMOS) technology, some electrostatic actuators beca
Externí odkaz:
https://doaj.org/article/8ab36340c4294c238e2e466973fada90
Autor:
Almothana Albukhari, Ulrich Mescheder
Publikováno v:
Actuators, Vol 10, Iss 10, p 276 (2021)
The mechanism of the inchworm motor, which overcomes the intrinsic displacement and force limitations of MEMS electrostatic actuators, has undergone constant development in the past few decades. In this work, the electrostatic actuation unit cell (AU
Externí odkaz:
https://doaj.org/article/c1b6428daf8a4a98ad08e334fc196529
Publikováno v:
Mechatronics
Mechatronics, 2023, 89, pp.102928. ⟨10.1016/j.mechatronics.2022.102928⟩
Mechatronics, 2023, 89, pp.102928. ⟨10.1016/j.mechatronics.2022.102928⟩
International audience; In this paper, the design and experimental analysis of a piezo-motor for applications requiring compact size, high blocking and driving forces are presented. Mechanical design addresses difficulties associated with high integr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fd648318183763512d5fd44a6f5aa45d
https://hal.science/hal-03882445/file/rev_sofiane_2023_design.pdf
https://hal.science/hal-03882445/file/rev_sofiane_2023_design.pdf
Publikováno v:
Materials, Vol 13, Iss 18, p 3976 (2020)
Ultra-precision piezoelectric inchworm motor (PIM) is widely used in the optical equipment, microelectronics semiconductor industry and precision manufacturing for motion and positioning, but the multi-physics field simulation model for estimating PI
Externí odkaz:
https://doaj.org/article/e7b9be0edf2044b5be6919ee7f0f201c
Akademický článek
Tento výsledek nelze pro nepřihlášené uživatele zobrazit.
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Publikováno v:
Computer Applications in Engineering Education. 28:867-879
Publikováno v:
Materials, Vol 14, Iss 6688, p 6688 (2021)
Materials
Materials
Linear displacement is used for positioning and scanning, e.g., in robotics at different scales or in scientific instrumentation. Most linear motors are either powered by rotary drives or are driven directly by pressure, electromagnetic forces or a s
Publikováno v:
Materials
Volume 13
Issue 18
Materials, Vol 13, Iss 3976, p 3976 (2020)
Volume 13
Issue 18
Materials, Vol 13, Iss 3976, p 3976 (2020)
Ultra-precision piezoelectric inchworm motor (PIM) is widely used in the optical equipment, microelectronics semiconductor industry and precision manufacturing for motion and positioning, but the multi-physics field simulation model for estimating PI
Publikováno v:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers).
We present the first-ever successful jumps of a microrobot fabricated in a silicon-on-insulator (SOI) process with an energy storing spring etched into the silicon substrate. The 0.08 gram silicon robot used its onboard electrostatic inchworm motor t