Zobrazeno 1 - 10 of 16 pro vyhledávání: '"Imen Rezadad"'
1
Smooth TiO2 Thin Films Grown by Aqueous Spray Deposition for Long-Wave Infrared Applications
Autor: Evan M. Smith, Justin W. Cleary, Imen Rezadad, Sarmad Fawzi Hamza Alhasan, Robert E. Peale, Isaiah O. Oladeji, Vanessa C. Lowry, Hussain Abouelkhair, Seth Calhoun
Publikováno v: MRS Advances. 3:255-260
Self-assembled TiO2 films deposited by aqueous-spray deposition were investigated to evaluate morphology, crystalline phase, and infrared optical constants. The Anatase nano-crystalline film had ∼10 nm characteristic surface roughness sparsely punc
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::30da7ebbbbc165c97d0b0f7dc53a011f
https://doi.org/10.1557/adv.2018.20
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2
Ultraviolet-Assisted Release of Microelectromechanical Systems From Polyimide Sacrificial Layer
Autor: Robert E. Peale, Imen Rezadad, Kurt G. Eyink, Javaneh Boroumand Azad, Justin W. Cleary
Publikováno v: Journal of Microelectromechanical Systems. 24:2027-2032
Process heating of microelectromechanical systems (MEMSs) devices hardens polyimide sacrificial layers, complicating the final release and lowering yield for delicate structures. This paper reports ultraviolet (UV)-assisted release, which is demonstr
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2c41c41104fb49aa9e26da7b3f8eead5
https://doi.org/10.1109/jmems.2015.2463096
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3
Stress Analysis of Free-Standing Silicon Oxide Films Using Optical Interference
Autor: Robert E. Peale, Imen Rezadad, Evan M. Smith, Pedro Figueiredo, Javaneh Boroumand
Publikováno v: MRS Proceedings. 1536:155-160
We report a method for stress measurement and analysis in silicon oxide thin films using optical interference. Effects of design and fabrication on stress have been studied by fabricating submicron-thick slabs of oxide anchored at one end and extendi
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c90d52fb752d0c5bcd0f20f60d4b135a
https://doi.org/10.1557/opl.2013.910
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4
Vertical electrostatic force in MEMS cantilever IR sensor
Autor: Evan M. Smith, Ammar Alhasan, Imen Rezadad, Robert E. Peale, Javaneh Boroumand Azad
Publikováno v: SPIE Proceedings.
A MEMS cantilever IR detector that repetitively lifts from the surface under the influence of a saw-tooth electrostatic force, where the contact duty cycle is a measure of the absorbed IR radiation, is analyzed. The design is comprised of three paral
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::1168ed7d6fb2a4b6c8c44c6df1b6f13b
https://doi.org/10.1117/12.2052355
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5
Thermomechancial characterization in a radiant energy imager using null switching
Autor: Ammar Alhasan, Evan M. Smith, Robert E. Peale, Javaneh Boroumand, Imen Rezadad
Publikováno v: SPIE Proceedings.
Thermomechanical noise for a MEMs-based infrared detector using null switching (US patent 7977635) depends on vibrational amplitude, since IR radiation is transduced to a change in the duty cycle of a repetitively closing switch. Equipartition theore
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::e806375d0e36a931f8ffaad802c2c880
https://doi.org/10.1117/12.2052338
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8
MEMS clocking-cantilever thermal detector
Autor: Pedro Figueiredo, Deep Panjwani, Javaneh Boroumand, Robert E. Peale, Evan M. Smith, Oliver Edwards, Janardan Nath, Imen Rezadad
Publikováno v: SPIE Proceedings.
We present performance calculations for a MEMS cantilever device for sensing heat input from convection or radiation. The cantilever deflects upwards under an electrostatic repulsive force from an applied periodic saw-tooth bias voltage, and returns
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::b0d5f6a620bb49fcf8452c7618591176
https://doi.org/10.1117/12.2018102
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9
Patterning and hardening of gold black infrared absorber by shadow mask deposition with ethyl cyanoacrylate
Autor: Imen Rezadad, Janardan Nath, Deep Panjwani, Javaneh Boroumand, Evan M. Smith, Nima Nader-Esfahani, Robert E. Peale, Doug Maukonen
Publikováno v: SPIE Proceedings.
Patterning of gold-black infrared absorbing films by stencil lithography and hardening by polymer infusion is reported. Gold black nano-structured films are deposited through a thin metal shadow mask in a thermal evaporator in ~400 mTorr pressure of
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::ec4872d7590338aa01c078e7d3a06b3e
https://doi.org/10.1117/12.2018082
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10
Release of MEMS devices with hard-baked polyimide sacrificial layer
Autor: Janardan Nath, Javaneh Boroumand Azad, Evan M. Smith, Robert E. Peale, Imen Rezadad
Publikováno v: SPIE Proceedings.
Removal of polyimides used as sacrificial layer in fabricating MEMS devices can be challenging after hardbaking, which may easily result by the end of multiple-step processing. We consider the specific commercial co-developable polyimide ProLift 100
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::fc32e21fc1b8b4baede08677bbe40913
https://doi.org/10.1117/12.2018628
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