Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Imane Souli"'
Publikováno v:
Journal of Alloys and Compounds. 783:208-218
Thin films within the immiscible binary Cu-Mo system were synthetized by d.c. magnetron sputter co-deposition and studied over the entire composition range. In the as-deposited state, the alloy films present single-phase Cu(Mo) or Mo(Cu) solid soluti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::55c8bc4eeac8cc3f7e23b844963b1b73
https://doi.org/10.1016/j.jallcom.2018.12.250
https://doi.org/10.1016/j.jallcom.2018.12.250
Publikováno v:
Thin Solid Films. 653:301-308
Within this work, monolithic Cu-Mo alloy films were grown by d.c. magnetron sputter co-deposition at room temperature and 473 K on Si (100) substrates. The Cu-Mo system was studied within the complete concentration range between pure Cu and pure Mo w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::657693329c3e2faa19feaed5ffe2d017
https://doi.org/10.1016/j.tsf.2018.03.039
https://doi.org/10.1016/j.tsf.2018.03.039
Autor:
Velislava L. Terziyska, Johannes Zechner, Imane Souli, Christian Mitterer, Jozef Keckes, Werner Robl
Publikováno v:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 35:022201
Direct current magnetron sputter deposited Cu films have been grown on Si substrates without and with WTi barrier layers. The combined impact of thermal and kinetic energy activation of film growth on promoting Cu-Si interdiffusion and enhancing Cu3S
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3b9dfb0b92f97a6db4951507b2385a1f
https://doi.org/10.1116/1.4975805
https://doi.org/10.1116/1.4975805