Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Image-based Overlay Measurement"'
Publikováno v:
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Scanning Probe Microscopy (SPM) has emerged as a metrology solution for the semiconductor industry enabling high throughput defect review and high resolution 3D metrology. TNO has developed a Subsurface Ultrasonic Resonant Force Microscopy (SSURFM) f
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Image Based Overlay (IBO) measurement is one of the most common techniques used in Integrated Circuit (IC) manufacturing to extract the overlay error values. The overlay error is measured using dedicated overlay targets which are optimized to increas
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dris___00893::a6cad7e3564ea9b349dfb787fef79eec
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http://resolver.tudelft.nl/uuid:32d7cb9e-3b0d-46d1-ae92-5744857abf9e
Conference
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