Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Ilyssa Wells"'
Autor:
Ekta Bhatia, Jack Lombardi, Soumen Kar, Michael Senatore, Stephen Olson, Tuan Vo, Sandra Schujman, Jakub Nalaskowski, Hunter Frost, John Mucci, Brian Martinick, Pui Yee Hung, Ilyssa Wells, Thomas Murray, Corbet S. Johnson, Aleksandra Biedron, Vidya Kaushik, Dan Campbell, Matthew D. Lahaye, Satyavolu S. Papa Rao
Publikováno v:
IEEE Transactions on Quantum Engineering, Vol 4, Pp 1-8 (2023)
We report on the development and characterization of superconducting damascene tantalum nitride (TaN) nanowires, 100 nm–3 μm wide, with TaN thicknesses varying from 5 to 35 nm, using 193-nm optical lithography and chemical mechanical planarization
Externí odkaz:
https://doaj.org/article/4556c169aa114e52b4d718f3fabcc68c
Autor:
Soumen Kar, Harrison Walker, Archit Shah, Hunter Frost, Stephen Olson, John Mucci, Jakub Nalaskowski, Brian Martinick, Sandra Schujman, Thomas Murray, Corbet S. Johnson, Ilyssa Wells, Ronald Bourque, Stanley Pierce, Ekta Bhatia, Michael C. Hamilton, Satyavolu S. Papa Rao
Publikováno v:
IEEE Transactions on Applied Superconductivity. 33:1-5
Autor:
Ekta Bhatia, Soumen Kar, Jakub Nalaskowski, Tuan Vo, Stephen Olson, Hunter Frost, John Mucci, Brian Martinick, Pui Yee Hung, Ilyssa Wells, Sandra Schujman, Satyavolu S. Papa Rao
We report on the development of a chemical mechanical planarization (CMP) process for thick damascene Ta structures with pattern feature sizes down to 100 nm. This CMP process is the core of the fabrication sequence for scalable superconducting integ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::62279c1b5fb5ff305c1f16ea4b046ac0
http://arxiv.org/abs/2302.07732
http://arxiv.org/abs/2302.07732
Autor:
Christopher C. Hobbs, Eric Holland, Matt Malloy, S. Oktyabrsky, Steven W. Novak, Hyuncher Chong, Benjamin Bunday, Harlan Stamper, S. Olson, Brian Martinick, Jakub Nalaskowski, Dominic Ashworth, Thomas Murray, M. Rodgers, Michael Liehr, Satyavolu Papa Rao, Kathleen Dunn, Ilyssa Wells, Brendan O'Brien, Stephen Bennett, T. Ngai, M. Yakimov, Christopher Borst, N. Foroozani, Patrick A. Kearney, Kevin Osborn, Karsten Beckmann, Brett Baker-O'Neal, Vidya Kaushik
Publikováno v:
ECS Transactions. 85:151-161