Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Ilya V. Uvarov"'
Autor:
Andrey M. Belevtsev, Ivan O. Dryagin, Vasiliy L. Kruchkov, Ilya V. Uvarov, Anton S. Boldyreff, Vladimir F. Lukichev, Irina K. Epaneshnikova
Publikováno v:
Millimetre Wave and Terahertz Sensors and Technology XIII.
Effective design of micromechanical switches for operation in various frequency ranges is impossible without mathematical models including the correlation of electrophysical parameters with the design and technological parameters of their fabrication
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::26084c242666b1595a8dc0e60720c0be
https://doi.org/10.1117/12.2582078
https://doi.org/10.1117/12.2582078
Publikováno v:
SPIE Proceedings.
Electrostatically actuated MEMS switch with the resistive contact is presented. Design of the switch includes the active contact breaking mechanism, which allows to detach the beam from the signal electrode in case of sticking. The mechanism is reali
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d191f76205488b77a8f5aea8f905391c
https://doi.org/10.1117/12.2266439
https://doi.org/10.1117/12.2266439
Publikováno v:
SPIE Proceedings.
MEMS switch with the electrostatic actuation and the resistive contact was fabricated using surface micromachining. The movable electrode of the switch was the three-layer metallic cantilever having nanoscale thickness and high lengthto- thickness ra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b45731f4e9b6bf9066c7a80afc9321c4
https://doi.org/10.1117/12.2179558
https://doi.org/10.1117/12.2179558
Publikováno v:
SPIE Proceedings.
Resonant properties of the three-layer metallic cantilevers with 40 nm thickness are investigated. Two types of the nanocantilevers were fabricated: Cr-Al-Cr and Ti-Al-Ti. Resonant frequencies of the nanocantilevers were determined from the experimen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3545853918930fd6b96a9bb49d640607
https://doi.org/10.1117/12.2016751
https://doi.org/10.1117/12.2016751
Publikováno v:
Journal of Physics: Conference Series. 541:012018
Resonant properties of the three-layer metallic cantilevers with 40-120 nm thickness were investigated. Two types of cantilevers were fabricated: Cr/Al/Cr and Ti/Al/Ti. Dependencies of the fundamental resonant frequency and Q-factor on the cantilever
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::14e4bf841fd16e76b35e080a60f4d41b
https://doi.org/10.1088/1742-6596/541/1/012018
https://doi.org/10.1088/1742-6596/541/1/012018