Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ilya Grodnensky"'
Publikováno v:
SPIE Proceedings.
We present a new technique for accurate and fast evaluation of lithographic imaging performance at critical dimensions (CDs) of 100 nm and below. Its advantages over traditional methods that use either SEM or electrical CD metrologies are based on tw
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d124a2ef4bdef763cd68ab56a7737925
https://doi.org/10.1117/12.473410
https://doi.org/10.1117/12.473410
Publikováno v:
SPIE Proceedings.
A novel technique to characterize variations of the spatial (partial) coherence (sigma) across the image field in modern steppers and scanners has been developed and experimentally tested. It is based on the high sensitivity of the length L of macros
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4762e9cd5e2a0d29baebf8ffa5f1f49c
https://doi.org/10.1117/12.310758
https://doi.org/10.1117/12.310758