Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ilya A. Belyanov"'
Autor:
Artem A. Osipov, Alina E. Gagaeva, Anastasiya B. Speshilova, Ekaterina V. Endiiarova, Polina G. Bespalova, Armenak A. Osipov, Ilya A. Belyanov, Kirill S. Tyurikov, Irina A. Tyurikova, Sergey E. Alexandrov
Publikováno v:
Scientific Reports, Vol 13, Iss 1, Pp 1-19 (2023)
Abstract This work is devoted to the development of nanosphere lithography (NSL) technology, which is a low-cost and efficient method to form nanostructures for nanoelectronics, as well as optoelectronic, plasmonic and photovoltaic applications. Crea
Externí odkaz:
https://doaj.org/article/931e0d70f6f7493eaf072e183ca86ab8
Autor:
Artem A. Osipov, Gleb A. Iankevich, Anastasia B. Speshilova, Alina E. Gagaeva, Armenak A. Osipov, Yakov B. Enns, Alexey N. Kazakin, Ekaterina V. Endiiarova, Ilya A. Belyanov, Viktor I. Ivanov, Sergey E. Alexandrov
Publikováno v:
Scientific Reports, Vol 12, Iss 1, Pp 1-15 (2022)
Abstract In this work, we demonstrate the high efficiency of optical emission spectroscopy to estimate the etching profile of silicon structures in SF6/C4F8/O2 plasma. The etching profile is evaluated as a ratio of the emission intensity of the oxyge
Externí odkaz:
https://doaj.org/article/c17a47dbb61149f3919f84e4fcf4234c