Zobrazeno 1 - 10
of 12
pro vyhledávání: '"Ilker Ender Ocak"'
Autor:
Shuangqin Liu, Zouhair Sbiaa, Aveek N. Chatterjee, Hyun-Kee Chang, Alexandre Sinding, Stephen Breit, Ibrahim M. Elfadel, Ilker Ender Ocak, Wajih U. Syed, Jun Yan, Christopher Welham, Arnaud Parent
Publikováno v:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
We present the implementation and validation of a novel model for simulating comb squeezed-film damping. The model is computationally efficient regardless of finger count and optionally includes top and bottom encapsulation surfaces surrounding the f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a6dc1802a8fa65d875560e9d789e5bdb
https://doi.org/10.1109/transducers.2017.7994487
https://doi.org/10.1109/transducers.2017.7994487
Autor:
Christopher Welham, Wajih U. Syed, Zouhair Sbiaa, Ilker Ender Ocak, Hyun-Kee Chang, Stephen Breit, Jun Yan, Ibrahim M. Elfadel, Alexandre Sinding, Shuangqin Liu, Aveek N. Chatterjee
Publikováno v:
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).
A number of corrections to the well-known squeezed-film gas damping model are required to get accurate results for MEMS. This paper reports on the implementation and validation of a corrected squeezed-film damping (SFD) simulation for common MEMS str
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9dc164a200e570ae055d15c9602b1bb2
https://doi.org/10.1109/memsys.2017.7863551
https://doi.org/10.1109/memsys.2017.7863551
Publikováno v:
Analog Integrated Circuits and Signal Processing. 64:137-145
This paper reports a second order electromechanical sigma-delta readout for micro-g resolution accelerometers in addition to other high-sensitivity capacitive microsensors with large base capacitance. The chip implements a switched-capacitor readout
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c113a509b134b7b0fe7aa36dfbc47001
https://doi.org/10.1007/s10470-009-9433-4
https://doi.org/10.1007/s10470-009-9433-4
Ultrathick and High-Aspect-Ratio Nickel Microgyroscope Using EFAB Multilayer Additive Electroforming
Publikováno v:
Journal of Microelectromechanical Systems. 16:1025-1035
This paper presents a new approach for the development of a microgyroscope that has a 240-mum-thick multilayer electroformed-nickel structural mass and a lateral aspect ratio greater than 100. The gyroscope is fabricated using commercial multilayer a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::15288e6bdd9c02a403a4aac48ea363ec
https://doi.org/10.1109/jmems.2007.902431
https://doi.org/10.1109/jmems.2007.902431
Autor:
Ilker Ender Ocak, Jaibir Sharma, Dim-Lee Kwong, Daw Don Cheam, Bangtao Chen, Navab Singh, Alex Yuandong Gu, Geng L. Chua, Pushpapraj Singh, Angel T.H. Lin, Sanchitha Nirodha Fernando
Publikováno v:
2014 IEEE International Electron Devices Meeting.
A monolithic 9 degree of freedom capacitive inertial MEMS platform is presented in this paper. This platform for the first time integrates 3 axis gyroscopes, accelerometers, and Lorentz Force magnetometers together on the same chip without using any
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2af0c060a8b93cbd9219957bed9cd3b2
https://doi.org/10.1109/iedm.2014.7047103
https://doi.org/10.1109/iedm.2014.7047103
Autor:
Ibrahim M. Elfadel, Ilker Ender Ocak, Weilin Yang, TieJun Zhang, Aveek N. Chatterjee, Hongxia Li
Publikováno v:
Journal of Micromechanics and Microengineering. 27:015012
Squeezed-film damping (SFD) is a phenomenon that significantly affects the performance of micro-electro-mechanical systems (MEMS). The total damping force in MEMS mainly include the viscous damping force and elastic damping force. Quality factor (Q f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7d7d58bbf962cdd29e475c662818cee4
https://doi.org/10.1088/0960-1317/27/1/015012
https://doi.org/10.1088/0960-1317/27/1/015012
Publikováno v:
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
This paper presents a detailed SIMULINK model for a conventional capacitive Σ-Δ accelerometer system consisting of a MEMS accelerometer, closed-loop readout electronics, and signal processing units (e.g. decimation filters). By using this model, it
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::09f39d8ff1cfe17c0edbb4a27c0279b0
https://doi.org/10.1109/memsys.2009.4805509
https://doi.org/10.1109/memsys.2009.4805509
Publikováno v:
2008 Ph.D. Research in Microelectronics and Electronics.
This paper reports a 2nd order electromechanical sigma-delta accelerometer system. Accelerometer is fabricated using dissolved wafer process, and has a structural thickness of 15 mum. A large proof mass is used to decrease the mechanical noise of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0113e3ce0469fd44ff51f9211f65dfd8
https://doi.org/10.1109/rme.2008.4595720
https://doi.org/10.1109/rme.2008.4595720
Publikováno v:
19th IEEE International Conference on Micro Electro Mechanical Systems.
This paper presents a 240 µ m-thick nickel microgyroscope with a lateral aspect ratio greater than 100, fabricated using the EFAB TM commercial multi-layer additive electroforming process. The fabricated gyroscope demonstrates a measured mechanical
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::49255e52ba970f4da9acb61215dd9583
https://doi.org/10.1109/memsys.2006.1627888
https://doi.org/10.1109/memsys.2006.1627888
Autor:
Weilin Yang, Hongxia Li, Aveek N Chatterjee, Ibrahim (Abe) M Elfadel, Ilker Ender Ocak, TieJun Zhang
Publikováno v:
Journal of Micromechanics & Microengineering; Jan2017, Vol. 27 Issue 1, p1-1, 1p