Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ilja P. Soshnikov"'
Autor:
Ilja P. Soshnikov, Lolita G. Rotkina, Alexander V. Lunev, Michael E. Gaevski, Tatjana L. Makarova
Publikováno v:
SPIE Proceedings.
The paper presents the attempt of the use of the C 60 thin films as a negativ electron beam resist. A comparative study of C 60 films polymerized by the He-Cd laser and electron beam is made. It is shown that under the exposure by laser irradiation o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bcf3695bb17cb605bf728edc2bf59d24
https://doi.org/10.1117/12.309594
https://doi.org/10.1117/12.309594
Publikováno v:
SPIE Proceedings.
Recently the microelectronics devices fabricated on the basis of the topological structures with conic or point elements are applied widely. The traditional method of formation of the structures using an electron beam lithography, a chemical or ion b
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9f9fa2d171dbc54f4920f8bc7f19b38e
https://doi.org/10.1117/12.275806
https://doi.org/10.1117/12.275806