Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Ikuko Nakatani"'
Autor:
Ikuko Nakatani, Toshihide Agemura, Hiroaki Matsumoto, Shota Torikawa, Takahiro Sato, Masahiro Kiyohara, Yuka Aizawa, Takeshi Sunaoshi
Publikováno v:
Microscopy and Microanalysis. 23:1508-1509
Autor:
Masaaki Yoshida, Ikuko Nakatani, Kiyoshi Yasutake, Heiji Watanabe, Kouji Iwasaki, Hirotaka Komoda, Y. Yamamoto
Publikováno v:
Microelectronics Reliability. 46:2085-2095
FIB-induced charging is one of the most critical issues for achieving successful circuit modifications of LSI. We have developed novel charge neutralization techniques applicable to a wide current range (from pico to nanoampere-order) of FIB processi
Autor:
Takahiro Furuta, Satoru Honma, Takeshi Kaneko, Takahiro Sonomura, Ikuko Nakatani, Yo Yamamoto
Publikováno v:
Microscopy (Oxford, England). 63
Ten years have passed since a serial block-face scanning electron microscopy (SBF-SEM) method was developed [1]. In this innovative method, samples were automatically sectioned with an ultramicrotome placed inside a scanning electron microscope colum
Publikováno v:
Journal of The Surface Finishing Society of Japan. 63:215
Publikováno v:
Japanese Journal of Applied Physics. 44:7907
We have developed a novel antistatic technique for suppressing focused ion beam (FIB)-induced charging in a combined system of an FIB and a scanning electron microscope. Microprobing and FIB-assisted carbon deposition are utilized to make a current p
Autor:
Yuka Aizawa, Takahiro Sato, Takeshi Sunaoshi, Hiroaki Matsumoto, Toshihide Agemura, Shota Torikawa, Ikuko Nakatani, Masahiro Kiyohara
Publikováno v:
Microscopy & Microanalysis; 2017 Special issue, Vol. 23, p1508-1509, 2p, 1 Color Photograph, 2 Black and White Photographs