Technological and physical compatibilities in hybrid integration of laser and monolithic integration of waveguide, photodetector and CMOS circuits on silicon

Autor: Zhou, Ming-Jiang, Ikkink, Ton, Chalmers, John, van Kranenburg, Herma, Albers, Hans, Holleman, Jisk, Lambeck, Paul, Joppe, Jan Leendert, Bekman, Herman, de Krijger, Ton, Lambeck, P.V.

Publikováno v: Sensor Technology 1994: proceedings of the Dutch Conference on Sensor Technology 1994, 205-210
STARTPAGE=205;ENDPAGE=210;TITLE=Sensor Technology 1994

In this paper, technological and physical compatibilities in hybrid integration of AlInGaP laser and monolithic integration of ZnO monomode waveguide, pin-photodetector, CMOS circuits for laser power control and signal amplification on silicon substr

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=narcis______::c71b97c2ecbbc351e6ab0af782651b1f
https://research.utwente.nl/en/publications/technological-and-physical-compatibilities-in-hybrid-integration-of-laser-and-monolithic-integration-of-waveguide-photodetector-and-cmos-circuits-on-silicon(81294c18-4e84-456a-8f7b-5ebdebd45d02).html