Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ike Woo Lee"'
Autor:
Jae Hwan Lee, Chunrong Jia, Yong Doo Kim, Hong Hyun Kim, Tien Thang Pham, Young Seok Choi, Young Un Seo, Ike Woo Lee
Publikováno v:
International Journal of Analytical Chemistry, Vol 2012 (2012)
Trimethylsilanol (TMSOH) can cause damage to surfaces of scanner lenses in the semiconductor industry, and there is a critical need to measure and control airborne TMSOH concentrations. This study develops a thermal desorption (TD)-gas chromatography
Externí odkaz:
https://doaj.org/article/ce4804f5951b4b8db9229dcd64cc6ee5
Autor:
Young Un Seo, Chunrong Jia, Hong Hyun Kim, Tien Thang Pham, Jae Hwan Lee, Young Seok Choi, Ike Woo Lee, Yong Doo Kim
Publikováno v:
International Journal of Analytical Chemistry, Vol 2012 (2012)
International Journal of Analytical Chemistry
International Journal of Analytical Chemistry
Trimethylsilanol (TMSOH) can cause damage to surfaces of scanner lenses in the semiconductor industry, and there is a critical need to measure and control airborne TMSOH concentrations. This study develops a thermal desorption (TD)-gas chromatography
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b4f6e8569f3636f879e743b97da75b85
https://doaj.org/article/ce4804f5951b4b8db9229dcd64cc6ee5
https://doaj.org/article/ce4804f5951b4b8db9229dcd64cc6ee5