Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ij Kramer, G. F."'
Publikováno v:
Proceedings of the SPIE Optifab 2009, 11-14 May 2009, Rochester, NY, USA
Pure TUe
Pure TUe
The NANOMEFOS non-contact measurement machine for freeform optics has been completed. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::85c02d96dde04f2605626e363c5837c6
https://research.tue.nl/nl/publications/e1e75852-3f22-43e0-a823-a4c3cb09e6cc
https://research.tue.nl/nl/publications/e1e75852-3f22-43e0-a823-a4c3cb09e6cc
Publikováno v:
Pure TUe
Brinksmeier, E.Burke, T.Brussel, H. vanSpaan, H., 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009, 2-5 June 2009, San Sebastian, Spain, 1, 164-167
Proceedings of the 9th Euspen International Conference and 11th Annual General Meeting, 2-5 June 2009, San Sebastian, Spain, 164-168
STARTPAGE=164;ENDPAGE=168;TITLE=Proceedings of the 9th Euspen International Conference and 11th Annual General Meeting, 2-5 June 2009, San Sebastian, Spain
Brinksmeier, E.Burke, T.Brussel, H. vanSpaan, H., 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009, 2-5 June 2009, San Sebastian, Spain, 1, 164-167
Proceedings of the 9th Euspen International Conference and 11th Annual General Meeting, 2-5 June 2009, San Sebastian, Spain, 164-168
STARTPAGE=164;ENDPAGE=168;TITLE=Proceedings of the 9th Euspen International Conference and 11th Annual General Meeting, 2-5 June 2009, San Sebastian, Spain
This paper shows the machine concept, the realization and the test results of the completed NANOMEFOS non-contact measurement machine for freeform optics. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::095e775c60764f2127d249fad49ff4c1
https://research.tue.nl/en/publications/510a73b9-289a-419f-9cba-f2409fcd8944
https://research.tue.nl/en/publications/510a73b9-289a-419f-9cba-f2409fcd8944