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Publikováno v:
Physica C: Superconductivity. :1951-1952
Epitaxial YBCO films were in situ grown by the opposed-targets sputtering (OTS) method. The temperature T s was varied in range 700–890°C, optimum containing of O 2 gas in Ar/O 2 sputtering mixture was 5–10%. Substrates of SrTiO 3 and Al 2 O 3 w