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Publikováno v:
Journal of Applied Physics. 97:113525
Thin films deposited on wafers show, in some cases, large variations in stress. The local curvature is often used in the Stoney equation [G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909)] to calculate the local stress. This practice leads to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bf823a988c93797a37f9c4ef92e8aac1
https://doi.org/10.1063/1.1925328
https://doi.org/10.1063/1.1925328
