Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Ian E. Campbell"'
Publikováno v:
The Journal of Physical Chemistry C. 126:16357-16368
Publikováno v:
Journal of Materials Science: Materials in Electronics. 33:7598-7605
Publikováno v:
Applied Physics Letters. 119:102102
Molybdenum carbonitride films prepared by plasma enhanced atomic layer deposition were studied for use as Schottky contacts to n-type gallium nitride. Deposited using bis(tertbutylimino)bis(dimethylamino)molybdenum and a remote plasma N2/H2 plasma, t
Autor:
Ian E. Campbell, Suzanne E. Mohney, Alex Molina, Asad J. Mughal, Michael W. Thomas, Timothy N. Walter, Steven P. Dail
Publikováno v:
ECS Meeting Abstracts. :1072-1072
Although silicon (Si) currently dominates the semiconductor industry, its small 1.1 eV band gap limits its maximum operating temperature, which restricts its use in high-temperature, high-power devices. Gallium nitride (GaN) is an attractive semicond