Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Ian Chuang"'
Publikováno v:
Proceedings, Vol 1, Iss 4, p 354 (2017)
This paper reports on polysilicon piezo-resistors that are fabricated at a low thermal budget using aluminium-induced-crystallization (AIC) of ultra-high-vacuum e-beam evaporated silicon films. By in-situ phosphorus doping of precursor amorphous sili
Externí odkaz:
https://doaj.org/article/3ac48b8e67164b47a76ed14286c7ce8e
Publikováno v:
IEEE Electron Device Letters. 39:889-892
A polysilicon film with high gauge factor formed at a low thermal budget of 450 °C is reported in this paper. The polysilicon was formed using in-situ phosphorus doped ultra-high vacuum e-beam evaporated amorphous silicon film as a precursor for alu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fe96b7aa43c8278d6aa2be731037c899
https://doi.org/10.1109/led.2018.2829481
https://doi.org/10.1109/led.2018.2829481
Publikováno v:
2018 IEEE Micro Electro Mechanical Systems (MEMS).
This paper reports a low temperature, high gauge factor polysilicon piezo-resistor fabricated by aluminium induced crystallization (AIC) process at 450oC. Through in-situ phosphorus doping of ultra-high vacuum e-beam evaporated amorphous silicon prec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e2208dfada0d2b21df9bfda3195361aa
https://doi.org/10.1109/memsys.2018.8346737
https://doi.org/10.1109/memsys.2018.8346737
Publikováno v:
Proceedings, Vol 1, Iss 4, p 354 (2017)
This paper reports on polysilicon piezo-resistors that are fabricated at a low thermal budget using aluminium-induced-crystallization (AIC) of ultra-high-vacuum e-beam evaporated silicon films. By in-situ phosphorus doping of precursor amorphous sili
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::412786e681119f538f6911a3bc2c6bb9
https://www.mdpi.com/2504-3900/1/4/354
https://www.mdpi.com/2504-3900/1/4/354
Publikováno v:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
In this paper, we demonstrate a novel approach to form ultra-sharp high-aspect-ratio and high density nanotips at low temperature suitable for integration with nano-electro-mechanical structures in CMOS compatible manner. For the first time, Cr therm
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::842c310476e41cb30689ceab6f465eda
https://doi.org/10.1109/transducers.2017.7994301
https://doi.org/10.1109/transducers.2017.7994301
Publikováno v:
Journal of pediatric psychology. 41(8)
Background Pediatric obesity presents a significant burden. However, family-based behavioral group (FBBG) obesity interventions are largely uncovered by our health care system. The present study uses Return on Investment (ROI) and Internal Rate of Re
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2d42c30b3e440b7afd402f3cb89983be
https://pubmed.ncbi.nlm.nih.gov/26743573
https://pubmed.ncbi.nlm.nih.gov/26743573
Publikováno v:
Pacific Symposium on Biocomputing
Existing medical vocabularies lack rich terms to describe findings that are generated by modem molecular diagnostic procedures. Most bioinformatics resources were designed primarily to support the needs of the research community. We describe the deve
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e0ca50c55d89c6a71c7955b8c1d925fd
https://pubmed.ncbi.nlm.nih.gov/15759621
https://pubmed.ncbi.nlm.nih.gov/15759621