Zobrazeno 1 - 10
of 51
pro vyhledávání: '"Ian B. Flader"'
Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators
Autor:
Ian B. Flader, Anne L. Alter, Dongsuk D. Shin, Thomas W. Kenny, Lizmarie Comenencia Ortiz, Yunhan Chen
Publikováno v:
Journal of Microelectromechanical Systems. 29:1483-1492
Fatigue in thick ( $> 20~\mu \text{m}$ ), epitaxially deposited polysilicon MEMS is characterized from 25°C and up to 250°C in an environment free of oxygen and humidity. This work is the first to report fatigue initiated in the native epi-polysili
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5130902e93ecadec6bb4d0fb141605a6
https://doi.org/10.1109/jmems.2020.3021947
https://doi.org/10.1109/jmems.2020.3021947
Autor:
James M. L. Miller, Ian B. Flader, Yunhan Chen, Dongsuk D. Shin, Haoshen Zhu, Thomas W. Kenny, Subramanian Sundaram, Gabrielle D. Vukasin
Publikováno v:
Journal of Microelectromechanical Systems. 29:677-684
We study thermal-piezoresistive cooling in silicon micromechanical resonators at large currents and high temperatures. Crossing a thermal transition region corresponds to a steep reduction in resonance frequency, an abrupt plateauing in the effective
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7aa9e3265c93215797fe27a3a81f1191
https://doi.org/10.1109/jmems.2020.3022050
https://doi.org/10.1109/jmems.2020.3022050
Autor:
James M.L. Miller, Anne L. Alter, Nicholas E. Bousse, Yunhan Chen, Ian B. Flader, Dongsuk D. Shin, Thomas W. Kenny, Steven W. Shaw
Publikováno v:
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::585b50904a4fefd28de5586ae3f9fe07
https://doi.org/10.1109/mems51670.2022.9699668
https://doi.org/10.1109/mems51670.2022.9699668
Publikováno v:
Journal of Microelectromechanical Systems. 29:1118-1120
In this paper, we observe amplitude-dependent nonlinear dissipation in experimental measurements of the quality factor (Q). The ringdown response is used to quantify the magnitude of the amplitude-dependent effect in both polysilicon and single cryst
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::937e12a982264af712ac127d47cd1c8c
https://doi.org/10.1109/jmems.2020.3005323
https://doi.org/10.1109/jmems.2020.3005323
Autor:
Thomas W. Kenny, Woosung Park, David B. Heinz, Yushi Yang, Ian B. Flader, Dongsuk D. Shin, Eldwin J. Ng, Lizmarie Comenencia Ortiz, Yunhan Chen, Anne L. Alter, Kenneth E. Goodson
Publikováno v:
Journal of Microelectromechanical Systems. 28:372-381
This paper demonstrates a post-fabrication technique for creating highly compliant structures inside a hermetic, wafer-scale encapsulation process. Single crystal silicon micro-tethers were fabricated alongside compliant structures to temporarily pro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fba186045b7b9b5ed355ec6c1ac7fa8d
https://doi.org/10.1109/jmems.2019.2900761
https://doi.org/10.1109/jmems.2019.2900761
Autor:
David Elata, Thomas W. Kenny, Hyun-Keun Kwon, Shai Shmulevich, Danny A. Kassie, Ian B. Flader
Publikováno v:
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS).
For the first time ever, we demonstrate an Epi-Seal encapsulated, self-excited Franklin oscillator. This electromechanical switch oscillator, is driven by a constant input of 3.8 [V], sustains self-oscillations at a frequency of 88.6 [kHz], and requi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::86867a7457ee6ff90cc82fd802179eae
https://doi.org/10.1109/mems46641.2020.9056439
https://doi.org/10.1109/mems46641.2020.9056439
Autor:
Yunhan Chen, Dongsuk D. Shin, Thomas W. Kenny, Lizmarie Comenencia Ortiz, David B. Heinz, W Kenny Thomas, Anne L. Alter, Ian B. Flader
Publikováno v:
MRS Communications. 8:275-282
Millions of micro electro mechanical system sensors are fabricated each year using an ultra-clean process that allows for a vacuum-encapsulated cavity. These devices have a multi-layer structure that contains hidden layers with highly doped silicon,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c96c529c93ba6948f0eba3dcf79f71b2
https://doi.org/10.1557/mrc.2018.70
https://doi.org/10.1557/mrc.2018.70
Autor:
Janna Rodriguez, Dongsuk D. Shin, Yunhan Chen, Ian B. Flader, Thomas W. Kenny, Chae Hyuck Ahn
Publikováno v:
Journal of Microelectromechanical Systems. 26:1235-1243
This paper presents a novel wafer-level thin-film encapsulation process that allows both narrow and wide trenches, which are necessary for traditional structures such as comb-drives. Fully functional devices with trench widths up to 50 $\mu \text{m}$
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7468c0122b1b491b0fb1648dbad16136
https://doi.org/10.1109/jmems.2017.2758388
https://doi.org/10.1109/jmems.2017.2758388
Autor:
Jiangkun Sun, Ian B. Flader, Thomas W. Kenny, Chun Zhao, Yunhan Chen, Xuezhong Wu, Dingbang Xiao, Dustin D. Gerrard, Guillermo Sobreviela, Ashwin A. Seshia, Xin Zhou
Publikováno v:
Nature Communications
Nature Communications, Vol 10, Iss 1, Pp 1-9 (2019)
Nature Communications, Vol 10, Iss 1, Pp 1-9 (2019)
Understanding and controlling modal coupling in micro/nanomechanical devices is integral to the design of high-accuracy timing references and inertial sensors. However, insight into specific physical mechanisms underlying modal coupling, and the abil
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::887e1094f344ccd064e2e2d89172c1d7
Autor:
Anne L. Alter, Hyo Jin K. Kim, Thomas W. Kenny, Yunhan Chen, Ian B. Flader, Gabrielle D. Vukasin, Daniel D. Shin
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
This paper presents an investigation into the origin of nonlinear dissipation in MEMS flexural mode resonators driven in a highly nonlinear regime. By comparing devices with different combinations of thermoelastic and gas damping, and utilizing the r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3192b4910204285353fe563ba043770a
https://doi.org/10.1109/transducers.2019.8808777
https://doi.org/10.1109/transducers.2019.8808777