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pro vyhledávání: '"IR-62783"'
Publikováno v:
Microelectronic engineering, 86(4-6):10.1016/j.mee.2008.11.008, 761-764. Elsevier
SU-8 is often used as a structural material in Microsystems. In this work, the outgassing characteristics from such cross-linked SU-8 layers are studied using mass spectrometry and gas-chromatography techniques. With these methods the composition of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8ae5925d6e3be92abb4170b243319e42
https://doi.org/10.1016/j.mee.2008.11.008
https://doi.org/10.1016/j.mee.2008.11.008
