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Publikováno v:
Journal of micromechanics and microengineering, 19(6), 065012-065018. Institute of Physics (IOP)
This paper presents a study on the dielectric behavior of SU-8 photoresist. We present measurements on the leakage current levels through SU-8 layers of varying thickness. The leakage current is dominated by thermionic emission. We have further deter
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::756a4fea1d49995aef40ceb1441f05e6
http://eprints.eemcs.utwente.nl/secure2/15371/01/melai_micrmech.microeng..pdf
http://eprints.eemcs.utwente.nl/secure2/15371/01/melai_micrmech.microeng..pdf
