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Al2O3 is commonly used as host material for Er3+-doped integrated optical amplifiers. In this paper, a Graeco-Latin square is used in DC reactive magnetron sputtering deposition experiment in order to get low optical losses Al2O3 layer. By reasonable
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dris___00893::a42146c0955280b59e2e3d8530056d73
Autor:
Shuyi, Gan, Visser, Taco D., Docter, Boudewijn, Lenstra, Daan, Schouten, Hugo F., Klunder, D.J.W., Hilderink, L.T.H., Worhoff, Kerstin
Publikováno v:
ISSUE=7;STARTPAGE=258;ENDPAGE=261;TITLE=7th IEEE/LEOS Benelux Chapter Annual Symposium 2002
Al2O3 is commonly used as host material for Er3+-doped integrated optical amplifiers. In this paper, a Graeco-Latin square is used in DC reactive magnetron sputtering deposition experiment in order to get low optical losses Al2O3 layer. By reasonable
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=narcis______::4a0bfea735c35dac1409c1fe823de125
https://research.utwente.nl/en/publications/fabrication-of-low-optical-losses-al2o3-layer-used-for-er3doped-integrated-optical-amplifiers(a97d6d93-8901-4cab-88ca-47b96577c1fb).html
https://research.utwente.nl/en/publications/fabrication-of-low-optical-losses-al2o3-layer-used-for-er3doped-integrated-optical-amplifiers(a97d6d93-8901-4cab-88ca-47b96577c1fb).html