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pro vyhledávání: '"I.L. Golenitsky"'
Publikováno v:
9th International Vacuum Microelectronics Conference.
High precision long-focus field-emission low-energy electron probe was designed on base of the thin-film cold cathode. Some parts of electrostatic focusing system and 10 GHz pulse modulator are integrated with the cathode. The electron probe operates
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::acf177ea9adcaa07ccf39a84db8bf0f0
https://doi.org/10.1109/ivmc.1996.601889
https://doi.org/10.1109/ivmc.1996.601889
